CCZK-SFL Continuous Magnetron Coating Production Line

Feature description:

The CCZK-SFL series magnetron sputtering coating production line of Chicheng Company can be applied to the production of curtain wall glass, aluminum mirrors, and reflectors, equipped with rotating cathodes and flat cathode magnetron sputtering targets. Special metal or metal oxide, metal nitride thin film, metal elemental film, composite film, Low-E radiation film can be plated on large flat glass in one to multiple layers. It can also be coated on curved glass with small bends. The coating line has a high production capacity, with an annual coating area of over 2 million square meters. It is equipped with multi chamber transmission to fully ensure the uniformity and physical properties of the film layer.

Technical configuration

CCZK-SFL Continuous Magnetron Coating Production Line

Chamber structure: Adopting an efficient horizontal continuous magnetron coating production line, equipped with front and rear rough extraction chambers, front and rear transition chambers, front and rear precision extraction chambers, front and rear buffer chambers, and color plating chambers.

Target material design: Adopting new rotating cathode target materials and flat cathode target materials.

Power configuration: equipped with high-power intermediate frequency magnetron sputtering power supply

Transmission System: Roller Drive, Variable Frequency Adjustable, Inductive Chamber Door Opening System.

Vacuum system: diffusion pump (molecular pump)+Roots pump+mechanical pump+cryogenic pump

Coated glass or flat panel, customizable size

The production line adopts plug-in valves for chamber isolation, which can achieve effective isolation and stabilize process gases.

The production line adopts a uniform intake pipe structure design, and the airflow is injected evenly and smoothly;

Electrical control: The production line adopts PLC full process control, with fast production pace and equipped with industrial computer display system.

Human machine dialogue: The control system can achieve human machine dialogue and make necessary interventions in the production process in a timely manner. There are alarm prompts and fault displays during the operation process, and the fault display can prompt the operator to operate correctly and troubleshoot.

Other technical parameters:

Extreme vacuum: 3.0×10-2Pa

Water pressure flow rate ≥ 0.2Mpa 3m3/h; Water temperature ≤ 25 ℃; Air pressure: 0.4-0.8Mpa;

General specifications: W1200mm * L2000mm (single room) W1500mm * L2400mm (single room)

Vacuum chamber size or equipment configuration can be customized according to customer product and special process requirements

application

The Chicheng CCZK-SFL series continuous coating production line is mainly used for continuous coating of large-area products such as large flat glass, curtain wall glass, and low emissivity glass (LOW-E glass). It can be used to coat single-layer metal films, alloy films, or metal compound films. Can be used for large-area aluminum lens coating, reflector coating, and large-area sputtering coating requirements.

For more applications, please consult engineering and technical personnel

Sample image